Focused Ion Beam Sample Preparation of Complex Devices
نویسندگان
چکیده
منابع مشابه
Focused ion beam sample preparation for atom probe tomography
Atom Probe (AP) tomography is maturing into a routine method for the atomic resolution compositional analysis of metals, semiconductors and some polymers. This is often combined with a Transmission Electron Microscope (TEM) analysis of the same region of interest. The Focused Ion Beam (FIB) microscope has evolved as an essential tool for site and orientation specific sample preparation for such...
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This article deals with the development of an original sample preparation method for transmission electron microscopy (TEM) using focused ion beam (FIB) micromachining. The described method rests on the use of a removable protective shield to prevent the damaging of the sample surface during the FIB lamellae micromachining. It enables the production of thin TEM specimens that are suitable for p...
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The development of cryo-focused ion beam (cryo-FIB) for the thinning of frozen-hydrated biological specimens enabled cryo-electron tomography (cryo-ET) analysis in unperturbed cells and tissues. However, the volume represented within a typical FIB lamella constitutes a small fraction of the biological specimen. Retaining low-abundance and dynamic subcellular structures or macromolecular assembl...
متن کاملFocused ion beam preparation of samples for X-ray nanotomography.
The preparation of hard material samples with the necessary size and shape is critical to successful material analysis. X-ray nanotomography requires that samples are sufficiently thin for X-rays to pass through the sample during rotation for tomography. One method for producing samples that fit the criteria for X-ray nanotomography is focused ion beam/scanning electron microscopy (FIB/SEM) whi...
متن کاملFocused Ion Beam Fabrication of Individual Carbon Nanotube Devices
Focused ion beam (FIB) techniques have found many applications in nanoscience and nanotechnology applications in recent years. However, not much work has been done using FIB to fabricate carbon nanotube devices. This is mainly due to the fact that carbon nanotubes are very fragile and energetic ion beam from FIB can easily damage the carbon nanotubes. Here we report the fabrication of carbon na...
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ژورنال
عنوان ژورنال: Microscopy and Microanalysis
سال: 2005
ISSN: 1431-9276,1435-8115
DOI: 10.1017/s1431927605501284